| 单词 | ion pump |
| 释义 | ion pump A type of vacuum pump that can reduce the pressure in a container to about 1 nanopascal by passing a beam of electrons through the residual gas. The gas is ionized and the positive ions formed are attracted to a cathode within the container where they remain trapped. The pump is only useful at very low pressures, i.e. below about 1 micropascal. The pump has a limited capacity because the absorbed ions eventually saturate the surface of the cathode. A more effective pump can be made by simultaneously sputtering a film of metal, so that fresh surface is continuously produced. The device is then known as a sputter-ion pump |
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